Renishaw Interferometer


The basic configuration of a laser interferometer can achieve the measurement and compensation of three-axis positioning accuracy, repeat positioning accuracy, and reverse clearance of CNC machine tools.

By adding corresponding measuring mirror groups, it is possible to measure the horizontal and vertical yaw and pitch angles of the three-axis of the CNC machine tool, as well as to measure the flatness, straightness, and perpendicularity. Adding the rotary axis component RX10 can achieve measurement and compensation of the indexing accuracy of the rotating axes (A, B., C axes).

 

Linear measurement accuracy ± 0.5ppm

Linear resolution of 1nm

Maximum moving speed 4m/s

The time for updating environmental compensation is 7 seconds

Dynamic acquisition frequency 50KHZ

Linear measurement distance is set at 80m as the standard

Preheating time<6 minutes

Environmental temperature 0-40 ℃

 

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